1. Description:
Product description
Nitrogen trifluoride (NF3) is a colorless and stable gas under ambient conditions. The gas is incombustible but can support combustion. When the temperature is above 350℃, the gas will decompose slowly to produce fluorine of strong oxidation and therefore, it is a strong oxidant at high temperature
Typical technical data
Impurities | NF3≥99.995% Vol.% | NF3≥99.99% Vol.% | NF3≥99.98% Vol.% | NF3≥99.9% Vol.% |
CF4 | ≤20 Vol.ppm | ≤40 Vol.ppm | ≤100 Vol.ppm | ≤500 Vol.ppm |
N2 | ≤5 Vol.ppm | ≤5 Vol.ppm | ≤10 Vol.ppm | ≤50 Vol.ppm |
O2+Ar | ≤3 Vol.ppm | ≤5 Vol.ppm | ≤10 Vol.ppm | ≤50 Vol.ppm |
CO2 | ≤1 Vol.ppm | ≤5 Vol.ppm | ≤10 Vol.ppm | ≤10 Vol.ppm |
H2O | ≤1 Vol.ppm | ≤1 Vol.ppm | ≤1 Vol.ppm | ≤1 Vol.ppm |
HF | ≤1 Vol.ppm | ≤1 Vol.ppm | ≤1 Vol.ppm | ≤1 Vol.ppm |
SF6 | ≤1 Vol.ppm | ≤2 Vol.ppm | ≤2 Vol.ppm | ≤25 Vol.ppm |
N2O | ≤1 Vol.ppm | ≤5 Vol.ppm | ≤10 Vol.ppm | ≤10 Vol.ppm |
CO | ≤0.5 Vol.ppm | ≤5 Vol.ppm | ≤10 Vol.ppm | ≤10 Vol.ppm |
Physical property
molecular weight | melting point | boiling point | critical temperature | critical pressure | density of liquid | gas density | Water solubility | CAS NO. | hazard categories |
71.01 | -206.8℃ | -129℃ | -39.3℃ | 44.02atm(4.46MPa) | 1554kg/m3(1atm) | 2.95kg/m3(1atm 21℃） | 1.43*10-5(1atm，22℃) | 7783-54-2 | Class 2.3 |
Applications
Nitrogen trifluoride (NF3) has been widely used in electronic industry, semiconductor and solar photoelectricity industry etc. It’s a good etching and cleaning gas with advantages of no remaining, high cleaning speed and easy to decompose.